GEMΒΆ
SEMI 30
GEM defines certain behaviors of the equipment and how to use the SECS messages for that purpose.
- Handlers
- GEM Compliance
- State Models
- Equipment Processing States
- Documentation
- Control (Operator Initiated)
- Dynamic Event Report Configuration
- Trace Data Collection
- Alarm Management
- Remote Control
- Equipment Constants
- Process Recipe Management
- Process Recipe Management
- Material Movement
- Equipment Terminal Services
- Clock
- Limits Monitoring
- Spooling