SECS

SEMI E5

SECS-II defines the messages the data is transferred in between host and equipment over the HSMS protocol (and SECS-I serial). It specifies data types that contain the data and streams and functions that use these types for specific purposes.

• Variables
  • Type arrays
  • Getting data
  • Setting data
  • En-/Decoding
  • Array
  • List
  • Dynamic
• Functions
• Handler